JPS6339966Y2 - - Google Patents
Info
- Publication number
- JPS6339966Y2 JPS6339966Y2 JP1982095771U JP9577182U JPS6339966Y2 JP S6339966 Y2 JPS6339966 Y2 JP S6339966Y2 JP 1982095771 U JP1982095771 U JP 1982095771U JP 9577182 U JP9577182 U JP 9577182U JP S6339966 Y2 JPS6339966 Y2 JP S6339966Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- annular inner
- wall
- distance
- coating liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9577182U JPS592134U (ja) | 1982-06-28 | 1982-06-28 | 回転塗布装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9577182U JPS592134U (ja) | 1982-06-28 | 1982-06-28 | 回転塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS592134U JPS592134U (ja) | 1984-01-09 |
JPS6339966Y2 true JPS6339966Y2 (en]) | 1988-10-19 |
Family
ID=30228548
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9577182U Granted JPS592134U (ja) | 1982-06-28 | 1982-06-28 | 回転塗布装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS592134U (en]) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5337189A (en) * | 1976-09-17 | 1978-04-06 | Inoue Japax Res Inc | Production of surfactant |
JPS5337702A (en) * | 1976-09-18 | 1978-04-07 | Mitsui Mining & Smelting Co | Briquets |
JPS5337701A (en) * | 1976-09-20 | 1978-04-07 | Kobe Steel Ltd | Preparation of carbonaceous raw material for metallurgical use from coal |
JPS5472973A (en) * | 1977-11-24 | 1979-06-11 | Hitachi Ltd | Rotary applying unit |
JPS5999361A (ja) * | 1982-11-30 | 1984-06-08 | Kanaasu Data Kk | デジタル・レ−ト・メ−タ |
-
1982
- 1982-06-28 JP JP9577182U patent/JPS592134U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS592134U (ja) | 1984-01-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0444216Y2 (en]) | ||
CN101060069B (zh) | 液体处理装置 | |
KR930010972B1 (ko) | 회전기판의 표면상으로의 액제 도포장치 | |
JPS6231817B2 (en]) | ||
JP2002066428A (ja) | スピン処理装置 | |
JPS6339966Y2 (en]) | ||
JP3945569B2 (ja) | 現像装置 | |
JP2800008B2 (ja) | 回転処理装置及び回転処理方法 | |
JPS6376431A (ja) | スピン塗布装置 | |
JP4358410B2 (ja) | スピン処理装置 | |
JPH0568094B2 (en]) | ||
JPH09122560A (ja) | 回転式塗布装置 | |
JPH10340841A (ja) | スピン塗布装置 | |
JPS58106543A (ja) | スピンナ−塗布装置 | |
JPH0441975Y2 (en]) | ||
JPH0441976Y2 (en]) | ||
JPH1043665A (ja) | スピンコーター | |
JPS63181320A (ja) | レジスト塗布装置 | |
JP4025414B2 (ja) | スピン処理装置 | |
JPS58103132A (ja) | スピンナ−装置 | |
JPH0777635B2 (ja) | スピン塗布装置 | |
JP4410331B2 (ja) | スピン処理装置 | |
JP2849539B2 (ja) | 回転式塗布装置 | |
JPH11283902A (ja) | スピン処理装置 | |
JPH0380527A (ja) | レジスト回転塗布装置 |